Fundamentals of X-Ray Diffraction and Scattering
From KERRI PHILLIPS
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From KERRI PHILLIPS
Presented by Don Savage, WCNT, UW–Madison
The tutorial will cover the basics of x-ray diffraction (XRD) and x-ray scattering. For XRD from polycrystalline materials, the focus will be on phase identification, texture, and grain size determination highlighting the use of the Bruker d8 discover x-ray diffractometer. Methods to determine thin-film stress, by measuring strain anisotropy will also be discussed. For single crystals, high-resolution XRD to determine epitaxial film thickness and strain using the Panalytical Empyrean x-ray diffractometer will be discussed. For x-ray scattering in reflection (XRR), film density, thickness, and interface roughness can be determined even for amorphous or polycrystalline layers. When used in transmission, the technique is called small-angle x-ray scattering (SAX), where the size and ordering of domains in the 10’s of nanometer scale can be analyzed. As the talk proceeds, the focus will be on the best technique needed to approach a specific material’s characterization problem as well as its strengths and limitations.
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