The Field-Emission Scanning Electron Microscope (FESEM) imaging and analysis capabilities were explored. FESEMs are used when application analysis requires single-nanometer resolution for surface examination.
The discussion started with a basic FESEM overview, reviewing the major physical scanning microscope components, such as the electron column, specimen chamber, workstation and detectors (including x-ray spectroscopy). This overview includes diagrams of the major vacuum components in the electron beam column and the specimen chamber. Next, the various detectors, chamber cameras, sample stage specifications and sample mounting techniques were be discussed. Additionally, applications for both materials science (metals, composites and polymers) and life science (animal and plant) were examined.