Presented by Jerry Hunter, WCNT Director, UW–Madison

Secondary Ion Mass Spectrometry offers analysis of inorganic and organic materials with ppm to ppb detection limits. Owing to its low detection limits and ability to obtain in-depth information, dynamic-SIMS has been used extensively by the semiconductor community for depth profiling of dopants in a variety of electronic materials. More recently static-SIMS has been applied to organic and biological material analysis. This presentation will introduce users to both the dynamic SIMS and static SIMS techniques, including how the techniques work, quantification, instrumentation, strengths and limitations of the technique, and applications.